Focused-Ion-Beam Fabrication of Slanted Grating Couplers in Silicon-on-Insulator Waveguides
- 7 May 2007
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 19 (11) , 816-818
- https://doi.org/10.1109/lpt.2007.897293
Abstract
We have designed and fabricated an efficient grating coupler for coupling light between optical fibers and silicon-on-insulator waveguides. The coupler consists of 88-nm-wide slits, etched at an angle of 58deg to the surface normal. They are defined by direct etching with a focused ion beam, using iodine gas and an alumina hard mask. The measured efficiency is 46%Keywords
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