Improved Oblique-Incidence Interferometer
- 1 June 1975
- journal article
- Published by SPIE-Intl Soc Optical Eng in Optical Engineering
- Vol. 14 (3) , 143257-143257-
- https://doi.org/10.1117/12.7971879
Abstract
An oblique-incidence interferometer for testing the flatness of fine-ground surfaces is described. This uses reflecting diffraction gratings to divide and recombine the beams, resulting in a very compact optical system. In addition, the relative amplitudes of the interfering beams can be adjusted, by a suitable choice of the grating orders used, to give fringes of excellent visibility with surfaces having a wide range of refleetances.Keywords
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