100-Hz KrF laser plasma x-ray source

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Abstract
The Rutherford Appleton Laboratory Repetitive Laser-Plasma X-ray Source has been scaled to repetition rates of up to 100 Hz. An average power of 40 mW/sr has been measured from mylar tape targets in the spectral region 0.28 < h(upsilon) < 0.53 keV (the `water window') with approximately 30% of the emission in the hydrogen-like carbon ion L(alpha) (h(upsilon) equals 368 eV) line. A scanning transmission x-ray microscope (STXM) was used for the first time with a laser-plasma source to generate test images. The source was also run with Cu and Fe targets to generate h(upsilon) approximately equals 1 keV x-rays in atmospheric pressure helium, yielding at 30 Hz an average power of approximately 9 mW/sr. Proximity x-ray microlithography images in 1.2 micrometers thick photoresist have accurately reproduced features of approximately 0.3 micrometers.

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