An evaluation of the capabilities of photon and electron spectroscopies for nondestructive quantitative measurements on analyte depth profiles by the angle-resolved signal ratio method
- 1 May 1989
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 7 (3) , 1655-1662
- https://doi.org/10.1116/1.576066
Abstract
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