A Bird's‐Beak‐Free Sealed‐Interface Local Oxidation Technology for Submicron Ultra‐Large‐Scale Integrated Circuits
- 1 August 1990
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 137 (8) , 2586-2588
- https://doi.org/10.1149/1.2086991
Abstract
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