Study of electrochemical etch-stop for high-precision thickness control of silicon membranes
- 1 April 1989
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 36 (4) , 663-669
- https://doi.org/10.1109/16.22472
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
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