An improved boron nitride technology for synchrotron x-ray masks

• 1 January 1988
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B
• Vol. 6  (1) , 154-161
• https://doi.org/10.1116/1.584035

Abstract

Keywords

• RADIATION HARDNESS
• HEAT TREATMENT
• ELECTROMAGNETIC RADIATION
• SYNCHROTRON RADIATION
• PHASE SEPARATION
• INTEGRATED CIRCUIT
• IONIZING RADIATION
• NITROGEN