Köhler illumination and brightness measurement with lanthanum hexaboride cathodes

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Abstract
An aperture illumination system such as a Köhler system offers the ability to illuminate an electron probe system with the peak brightness from an electron source. It also provides an object with an ideal step-function current distribution. This paper describes results obtained using Köhler illumination on a short focal length final lens SEM. Application of the SEM to brightness measurement is discussed at some length. Examples of overall probe performance for scanning transmission electron microscopy, low-loss surface microscopy, and microfabrication are also given.

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