Minimization of Ga Induced FIB Damage Using Low Energy Clean-up
- 31 July 2006
- journal article
- abstracts
- Published by Oxford University Press (OUP) in Microscopy and Microanalysis
- Vol. 12 (S02) , 1736-1737
- https://doi.org/10.1017/s1431927606065457
Abstract
Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006Keywords
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