Study of Mesa Undercuts Produced in GaAs with H 3 PO 4 ‐ Based Etchants

• 1 August 1989
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 136  (8) , 2405-2410
• https://doi.org/10.1149/1.2097384

Abstract