Characterisation of thin sputtered silicon nitride films by NRA, ERDA, RBS and SEM

This publication has 14 references indexed in Scilit:

• Hydrogen profiles of thin PVD silicon nitride films using elastic recoil detection analysis
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1992
• Modifications in α-Si:H during thermal annealing: In situ spectroscopic ellipsometry
  Journal of Applied Physics, 1991
• Thermo-Mechanical Properties of Silicon Nitride and Their Dependence on Microstructure
  Materials Science Forum, 1991
• LPCVD Silicon Nitride and Oxynitride Films
  Published by Springer Nature ,1991
• The analysis of elastic recoil detection data
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1988
• High‐Temperature Behavior of Chemically Treated Silicon Nitride Powders
  Journal of the American Ceramic Society, 1988
• Ammonia-Annealed SiO₂ Films for Thin-Gate Insulator
  Japanese Journal of Applied Physics, 1982
• The Frankfurt PIG ion source
  Nuclear Instruments and Methods in Physics Research, 1981
• 15N hydrogen profiling: Scientific applications
  Nuclear Instruments and Methods, 1978
• Proton capture by 15N at stellar energies
  Nuclear Physics A, 1974