A piezoelectrically operated optical chopper by quartz micromachining
- 1 March 1995
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 4 (1) , 3-9
- https://doi.org/10.1109/84.365364
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- A self-excited chopper made by quartz micromachining and its application to an optical sensorPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- A piezoelectrically operated optical chopper by quartz micromachiningJournal of Microelectromechanical Systems, 1995
- Micromachining of quartz and its application to an acceleration sensorSensors and Actuators A: Physical, 1990
- Design of a solid-state gyroscopic sensor made of quartzSensors and Actuators A: Physical, 1990
- Theory to Predict Etching Shapes in Quartz Crystal and Its Application to Design DevicesTransactions of the Society of Instrument and Control Engineers, 1987