Crosslinked Poly(2,2,2‐Trichloroethyl Methacrylate) as a Highly Sensitive Positive Electron Resist
- 1 September 1979
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 126 (9) , 1635-1636
- https://doi.org/10.1149/1.2129347
Abstract
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