Lithography by tapping-mode atomic force microscopy with electrostatic force modulation

• 1 March 1998
• journal article
• research article
• Published by Springer Nature in Applied Physics A
• Vol. 66  (7) , S95-S98
• https://doi.org/10.1007/s003390051108

Abstract

Keywords

• PACS: 07.99.L; 61.16.C; 85.40.H