Transport coefficients of SF6 and SF6-N2 mixtures from revised data

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Abstract
The Boltzmann equation for the electron energy distribution has been solved for N2, SF6, and SF6‐N2 mixtures. Calculated transport coefficients for N2 have been found to agree well with published experimental values and with previously published calculations. Using the comparison between theoretical and experimental transport coefficients for SF6, available data for momentum transfer and attachment cross sections have been reviewed and excitation cross sections evaluated. The set of representative cross sections thus derived yields good agreement between calculated and measured ionization and attachment coefficients and drift velocities for pure SF6, while on the other hand calculated diffusion coefficient‐to‐mobility ratios are about 30% high. In the case of N2‐SF6 mixtures the theoretical effective ionization coefficients were consistent with those obtained experimentally by Itoh et al. [J. Phys. D 1 2, 2167 (1979)]. However, for attachment coefficients agreement between theory and the experimental results of Siddagangappa et al. [J. Phys. D 1 5, L83 (1982)] is poor, and numerous attempts to resolve this discrepancy so far have failed.