High Electron Mobility Silicon Films Grown on Sapphire at High Growth Rate

• 1 January 1977
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 16  (S1)
• https://doi.org/10.7567/jjaps.16s1.547

Abstract

Keywords

• ELECTRON MOBILITY
• HIGH ELECTRON
• MOBILITY SILICON
• SAPPHIRE
• SILICON FILMS
• FILMS GROWN
• HIGH GROWTH