Preparation of Conductive SrMoO3 Thin Films and Their Application to Electrodes for Thin Film Capacitors
- 1 January 1985
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 24 (S3)
- https://doi.org/10.7567/jjaps.24s3.21
Abstract
Perovskite SrMoO3 thin films are prepared by RF magnetron sputtering at substrate temperatures above 600°C. They show metallic conduction, and their resistivity at 300 K is (1.5∼1.8)×10-4Ω·cm. The tri-layered capacitor fabricated from SrMoO3 (base electrode) –SrTiO3 (dielectric layer)–Cu (counter electrode) has a capacitance of about 0.8 µF/cm2 at 1 kHz and 30°C, where the thickness of the SrTiO3 layer is 700Å.Keywords
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