The Effect of Growth Ambients on the Local Atomic Structure of Thermally Grown Silicon Dioxide Thin Films
- 1 January 1987
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Water and its relation to broken bond defects in fused silicaThe Journal of Chemical Physics, 1976
- The Effects of Trace Amounts of Water on the Thermal Oxidation of Silicon in OxygenJournal of the Electrochemical Society, 1974