Characterization of amorphous barium titanate films prepared by rf sputtering

• 1 March 1979
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science and Technology
• Vol. 16  (2) , 311-314
• https://doi.org/10.1116/1.569934

Abstract

Keywords

• TITANATE FILMS
• AMORPHOUS BARIUM
• BARIUM TITANATE
• RF SPUTTERING
• FILMS PREPARED