Acoustic emission and precision force-displacement observations of spherical indentations into TiN films on silicon
- 1 December 1994
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 68-69, 598-602
- https://doi.org/10.1016/0257-8972(94)90223-2
Abstract
No abstract availableKeywords
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- A simple predictive model for spherical indentationJournal of Materials Research, 1993
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- Ion-beam-deposited films produced by filtered arcevaporationThin Solid Films, 1990