Knudsen forces on microcantilevers
- 15 November 2002
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 92 (10) , 6326-6333
- https://doi.org/10.1063/1.1515108
Abstract
When two surfaces at two different temperatures are separated by a distance comparable to a mean-free path of the molecules of the ambient medium, the surfaces experience Knudsen force. This mechanical force can be important in microelectromechanical systems and in atomic force microscopy. A theoretical discussion of the magnitude of the forces and the conditions where they can be encountered is discussed. A potential application of the Knudsen force in designing a cantilever-based vacuum gauge is discussed.This publication has 26 references indexed in Scilit:
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