Atomic-layer epitaxy of GaN quantum wells and quantum dots on (0001) AlN
- 15 April 2002
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 91 (8) , 5498-5500
- https://doi.org/10.1063/1.1458049
Abstract
We show that a dynamically stable Ga film is formed on (0001) AlN in a large range of Ga fluxes at a substrate temperature of 740 °C. This feature allows for atomic layer epitaxy (ALE) of GaN on\ud AlN by alternate exposure to Ga and N flux. We show that, at a growth temperature of 740 °C, one ALE cycle leads to the formation of a two-dimensional GaN layer, whereas further cycles lead to the formation of GaN quantum dots following a Stranski–Krastanov growth mode. This behavior\ud is confirmed by atomic force microscopy, transmission electron microscopy, and\ud cathodoluminescenceThis publication has 14 references indexed in Scilit:
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