Silk Polymer Coating with Low Dielectric Constant and High Thermal Stability for Ulsi Interlayer Dielectric
- 1 January 1997
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Designing reliable polymer coatingsPolymer Engineering & Science, 1996
- Structure Development in Polyimide FilmsMRS Proceedings, 1993
- Observation of Glass Transition Temperatures in Polymeric Thin Films by Wafer Curvature MeasurementsMRS Proceedings, 1991
- Moisture Uptake of Bisbenzocyclobutene (BCB) Films for Electronic Packaging ApplicationsMRS Proceedings, 1990