Thin Silicon Film Growth on Polycrystalline Alumina Ceramic

• 1 January 1964
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 111  (10) , 1196-1198
• https://doi.org/10.1149/1.2425954

Abstract

Keywords

• CERAMIC
• THIN SILICON
• POLYCRYSTALLINE ALUMINA
• SILICON FILM GROWTH