Beam effects in Auger electron spectroscopy analysis of titanium oxide films

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Abstract
Auger spectra of TiO2,Ti2O3, TiO, and Ti were determined as a function of sputter time to study ion-beam and electron-beam effects in AES depth profile analysis of titanium oxides. The value of the oxygen–titanium peak amplitude ratio for a given titanium oxide depends on ion-beam energy, electron-beam current density, and oxide composition. Both ion and electron beam give rise to an apparent reduction effect and their combined action stimulates the formation of carbide at the sample surface. The latter effect is more pronounced at an ion-beam energy of 0.5 keV than at 2 keV. Depth resolution characterized by the width of the transition region between oxide and metal decreases with increasing ion-beam energy and with increasing thickness of the sputtered layer.

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