14 MHz Micromechanical Oscillator
- 1 January 2001
- book chapter
- Published by Springer Nature
- p. 1074-1077
- https://doi.org/10.1007/978-3-642-59497-7_254
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- VHF free-free beam high-Q micromechanical resonatorsJournal of Microelectromechanical Systems, 2000
- Quality factors in micron- and submicron-thick cantileversJournal of Microelectromechanical Systems, 2000
- Noise in microelectromechanical system resonatorsIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 1999
- Measurement of mechanical resonance and losses in nanometer scale silicon wiresApplied Physics Letters, 1999