X-ray diffraction measurements on samples of molybdenum and zirconium growth with ion assistance at low temperatures support the occurrence of plastic flow during growth, provided the level of bombardment is high enough. As the energy of the argon ions was increased, the lattice strain in the growth direction increased to a maximum before decreasing slowly. That this is a plastic flow transition is shown by the independence of the maximum strain on preparation conditions and by the changes in microstructure. In particular, the grain size in the growth direction decreased and the preferred orientation favored the usual wire drawing textures of these metals. For the zirconium films this involved a change in preferred orientation from a (00.2) to a (10.0) texture. A reduction in strain is observed at high bombardment levels.