TOWARD A TOMOGRAPHIC ATOM-PROBE
Open Access
- 1 November 1989
- journal article
- Published by EDP Sciences in Le Journal de Physique Colloques
- Vol. 50 (C8) , C8-501
- https://doi.org/10.1051/jphyscol:1989886
Abstract
The POSAP (Position Sensitive Atom Probe) has opened new outlooks for the three-dimensional analysis of materials with a resolution less than 1 nm. This paper presents a project for a Tomographic Atom Probe, based on the design of a multianode detector and the measurement of collected charges for each anode. The goal is to register the position and the time of flight for every ion even for simultaneous eventsKeywords
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