Mold-assisted near-field optical lithography
- 1 May 1999
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 46 (1-4) , 69-72
- https://doi.org/10.1016/s0167-9317(99)00017-9
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Mold-assisted nanolithography: A process for reliable pattern replicationJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1996
- Imprint Lithography with 25-Nanometer ResolutionScience, 1996
- Imprint of sub-25 nm vias and trenches in polymersApplied Physics Letters, 1995
- Analysis of the near field image formation of dielectric gratingsUltramicroscopy, 1995
- Improvements of Nanostructure Patterning in X-Ray Mask MakingJapanese Journal of Applied Physics, 1994