Kinetics and Oxide Properties of Silicon Oxidation in O 2 ‐ H 2 ‐ HCl Mixtures
- 1 December 1979
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 126 (12) , 2249-2254
- https://doi.org/10.1149/1.2128937