Cu CVD from Copper(II) Hexafluoroacetylacetonate: I . A Cold Wall Reactor Design, Blanket Growth Rate, and Natural Selectivity
- 1 November 1995
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 142 (11) , 3903-3911
- https://doi.org/10.1149/1.2048432
Abstract
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