Some Ultimate Limits on the Measurement of Surfaces Using Stylus Techniques

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Abstract
In recent years the use of stylus instruments has progressed from mainly engineering applications into research fields. This is mainly due to the development of highly sensitive instruments. Some results of this work are shown together with the limits of measurement encountered on the surface layer, the surface-instrument interface and the instrument itself. The extension of the technique to measure mechanical as well as geometrical features of the surface skin is shown, and finally some future developments are predicted.

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