Surface Chemistry of Planarized SiLK-Films Studied by XPS

• 19 June 2000
• journal article
• Published by Springer Nature in Microchimica Acta
• Vol. 133  (1-4) , 113-117
• https://doi.org/10.1007/s006040070079

Abstract

Keywords

• SILK
• CMP
• SURFACE CHEMISTRY
• SLURRIES
• VALENCE BANDS
• CORE LEVELS
• SLURRY PH
• PLANARIZED
• HYDROXYL REACTIVE