Capillary arrays with variable channel density: An improved gas injection system

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Abstract
A new design concept has been studied for capillary array collimators used for the injection of gases, e.g., in gas source molecular-beam epitaxy. So far, the conventional designs suffer from either poor uniformity or low efficiency in precursor consumption (ratio of flux impinging on substrate to total emitted flux). The key feature of our new design is that the surface channel density is not homogeneous across the array but radius dependent instead, with the density of channels increasing towards the source array edge. In this way the steep decrease of the flux away from the beam center, which is a characteristic feature of conventionally designed arrays, is compensated. The numerical analysis shows that with the improved design, a high degree of uniformity (≳99%) can be achieved while at the same time the efficiency is increased by more than one order of magnitude compared to conventional capillary arrays.

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