Realization of an integrated VDF/TrFE copolymer-on-silicon pyroelectric sensor
- 1 December 1995
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 29 (1-4) , 85-88
- https://doi.org/10.1016/0167-9317(95)00120-4
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- A VDF/TrFE copolymer on silicon pyroelectric sensor: Design considerations and experimentsSensors and Actuators A: Physical, 1995
- Application of VDF/TrFE copolymer for pyroelectric image sensorsSensors and Actuators A: Physical, 1994
- P(VDF/TrFE) copolymer films for the fabrication of pyroelectric arraysSensors and Actuators A: Physical, 1993
- Pyroelectric IR sensor using vinylidene fluoride-trifluoroethylene copolymer filmFerroelectrics, 1984