Some factors affecting the form of mass spectra in the atom probe field-ion microscope
- 1 March 1976
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 9 (3) , 187-193
- https://doi.org/10.1088/0022-3735/9/3/014
Abstract
The essential features of the field-ion atom probe instrument are described, and analyses from a number of different types of specimens are presented. It is found that charge states between +1 and +4e occur depending on the specimen evaporation field. The mass resolution is found to be approximately 1 part in 150, and calculations show that this is a direct consequence of the field evaporation rate dependence of the specimen material and of the pulse shape employed. Quantitative analyses of various specimens are in good agreement with expected values provided care is taken to eliminate effects of hydrogen. The occurrence of a number of complex ions is reported.Keywords
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