Nature of the Damaged Layer on Abraded Silicon Specimens

• 1 January 1962
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 109  (8) , 743
• https://doi.org/10.1149/1.2425544

Abstract

Keywords

• DAMAGED LAYER
• LAYER ON ABRADED
• ABRADED SILICON SPECIMENS