X-ray diffraction analysis and x-ray photoelectron spectroscopy of α- and β-W thin films grown by ion beam assisted deposition
- 1 July 1993
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 11 (4) , 1470-1473
- https://doi.org/10.1116/1.578686
Abstract
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