A useful method for approximating the profile of ions implanted through a thin film

1 December 1977

journal article
Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices

Vol. 24 (12) , 1365-1366
https://doi.org/10.1109/t-ed.1977.19016

Abstract

An approximate calculation method is presented for finding profiles of ions implanted through a thin film, based on standard range tables. Both the projected range and straggling in the substrate are calculated.

Keywords

SUBSTRATE
STRAGGLING
METHOD FOR APPROXIMATING
APPROXIMATING THE PROFILE
PROFILE OF IONS
IMPLANTED
RANGE TABLES
APPROXIMATE CALCULATION
PROJECTED RANGE