Tantalum‐Based Encapsulants For Thermal Annealing of GaAs

• 1 March 1991
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 138  (3) , 834-837
• https://doi.org/10.1149/1.2085686

Abstract

Keywords

• THERMAL ANNEALING