Nitrogenation of Silicon Carbide Layers Deposited on Silicon Single-Crystal Wafers via Pyrolysis of Poly(methylsilane)
- 1 June 1995
- journal article
- Published by American Chemical Society (ACS) in Chemistry of Materials
- Vol. 7 (6) , 1214-1220
- https://doi.org/10.1021/cm00054a022
Abstract
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