Study on Radiation-Induced Reaction in Microscopic Region for Basic Understanding of Electron Beam Patterning in Lithographic Process (I) –Development of Subpicosecond Pulse Radiolysis and Relation between Space Resolution and Radiation-Induced Reactions of Onium Salt–
- 30 June 2002
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 41 (Part 1, No) , 4208-4212
- https://doi.org/10.1143/jjap.41.4208
Abstract
No abstract availableKeywords
This publication has 0 references indexed in Scilit: