Mechanical distortions of support frames for x-ray lithography masks

• 1 November 1990
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B
• Vol. 8  (6) , 1570-1574
• https://doi.org/10.1116/1.585117

Abstract

Keywords

• MECHANICAL DISTORTIONS
• RAY LITHOGRAPHY
• LITHOGRAPHY MASKS
• SUPPORT FRAMES