Size Effects in Metallic Films
Open Access
- 1 January 1978
- journal article
- research article
- Published by Wiley in Active and Passive Electronic Components
- Vol. 5 (2) , 99-105
- https://doi.org/10.1155/apec.5.99
Abstract
Based on the theories so far developed, an approximate expression for the resistivity of metallic films is derived, which takes into account film thickness, grain diameter, as well as the coefficients of surface scattering and grain boundary scattering. The derived formulae are compared with the results achieved by other authors.Keywords
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