High-resolution L M M Auger spectra from argon implanted in Be and Si

• 1 March 1979
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science and Technology
• Vol. 16  (2) , 562-565
• https://doi.org/10.1116/1.569997

Abstract

Keywords

• BACKGROUND SUBTRACTION
• ENERGY LEVELS
• AUGER ELECTRON SPECTROSCOPY
• ELECTRONIC STRUCTURE
• HIGH RESOLUTION
• BACKGROUND RADIATION
• SPECTRUM
• ION IMPLANTATION
• ELEMENTARY PARTICLES
• ALKALINE EARTH METAL