Thin-film gas sensor implemented on a low-power-consumption micromachined silicon structure
- 1 June 1998
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 49 (1-2) , 88-92
- https://doi.org/10.1016/s0925-4005(98)00039-2
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Characterization of a molybdenum oxide sputtered thin film as a gas sensorThin Solid Films, 1997
- Recent developments in semiconducting thin-film gas sensorsSensors and Actuators B: Chemical, 1995