A simple scatter method for optical surface roughness and slope measurements. Roughness of polished fused silica

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Abstract
For supersmooth optical surfaces, the equation relating diffusely scattered light to roughness and slope parameters assumes a simple form. Measurements of rms roughness and slope for such surfaces can be made with an instrument which accepts a solid angle much smaller than 2π steradian. Measurements made on fused silica surfaces yield values as low as 023 nm and 38 × 10−4 rad.

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