A GaAs monolithic array of impedance matched antenna/detector pixels for a 94 GHz imaging system
- 7 January 2003
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- No. 01631918,p. 181-184
- https://doi.org/10.1109/iedm.1989.74256
Abstract
The design, fabrication, and performance of a 4*4 pixel array of monolithic GaAs 94-GHz detector circuits is described. This large chip is developed to be a tile for much larger arrays consisting of thousands of pixels for 94-GHz imaging. Each pixel is a slot antenna on one face coupled through the GaAs to a microstrip circuit containing a Schottky-barrier diode on the opposite face. The microstrip circuit provides an optimum impedance match between the diode and the slot antenna so that no additional tuning to free space is required. The diode is fabricated using a selective ion implantation process optimized for uniformity, repeatability, and yield, and has zero-bias capacitance and series resistance, respectively, of 14 fF and 15 Omega . Process control is essential, because variations in diode parameters can mismatch and detune the circuit. With the diode optimally forward-biased for square-law operation and a video bandwidth of 1 MHz, the tangential signal sensitivity (TSS) peaked in the 92-96-GHz range and was always better than -50 dBm at 94 GHz.Keywords
This publication has 1 reference indexed in Scilit:
- Impedance of a radiating slot in the ground plane of a microstriplineIEEE Transactions on Antennas and Propagation, 1982