Analysis of Transport Processes in Vertical Cylinder Epitaxy Reactors

• 1 April 1977
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 124  (4) , 561-569
• https://doi.org/10.1149/1.2133351

Abstract

Keywords

• ANALYTIC SOLUTION
• MOMENTUM TRANSFER
• MASS TRANSFER
• EPITAXIAL GROWTH
• MATHEMATICAL MODEL
• LAMINAR FLOW
• ENERGY TRANSFER
• FLUID FLOW
• HEAT TRANSFER
• HEAT AND MASS TRANSFER
• CRYSTAL GROWTH