Calculation of SF6transport coefficients from revised data

Publisher Website
Google Scholar
Abstract
The transport coefficients of SF6 have been recalculated in the range of reduced field between 35 and 225 V cm-1 Torr-1 using the latest cross-section data. While fitting of calculated and experimental ionisation coefficients has been used to determine missing data on excitation cross-sections, calculations of the drift velocity and the diffusion and attachment coefficients provided a means of checking the consistency of the model and the data. The calculated drift velocity proved to be about 20% lower than the experimental value. The diffusion coefficients agreed well but the attachment coefficients compared poorly with measured values. Good fitting was obtained by reducing the width of the SF6- attachment cross-section to 30% and increasing the high-energy attachment cross-sections by about 30%.